A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronics industry .

2024年7月29日 · A photoresist is a light-sensitive polymer. When exposed to ultraviolet light, it turns to a soluble material. Those exposed areas can then be dissolved by using a solvent, leaving behind a pattern.

Modern photoresists are polymeric materials that are modifi ed when exposed to radiation (either in the form of visible, ultraviolet, or X – ray photons or in the form of energetic electron beams). A photoresists typically contains a photoactive compound (PAC) and an alkaline-soluble resin.

2024年10月30日 · Photoresist, a light-sensitive material, is essential in photolithography for transferring intricate circuit patterns onto semiconductor wafers. This article explores positive vs. negative photoresists, detailing their chemical mechanisms, processing parameters, and performance traits.

2022年3月16日 · Photoresist coatings and materials are an essential part of their fabrication as they are the main constituents of the photolithography process during the fabrication of the semiconductors. It is a micro-synthesis technique involving the use of photoresist chemicals for transferring geometric patterns onto the semiconductor substrate or films.

2024年5月25日 · The paper provides an overview of the recent advancements in positive photoresists, specifically targeting low-technology nodes for semiconductor chips. During the initial studies after Moore’s law became saturated, development focused on n-CARs as a potential replacement for CARs for patterning technology nodes under 30 nm.

Photoresists are organic compositions consisting of light-sensitive polymers or polymer precursors dissolved in one or more organic solvents. They are of two types-those that on exposure to light are further polymerized or cross linked forming a hardened coating which is resistant to etching solutions (negative types) and those that on exposure ...

Photoresists are a crucial part of semiconductor manufacturing as they allow the precise patterning required for modern electronic devices. It is therefore important to understand their different properties and the applications of different photoresist types to allow manufacturers to optimise their processes, achieve higher yields and push the ...

2023年9月30日 · Photoresist, a crucial component in semiconductor manufacturing, is a radiation-sensitive compound that can be classified into two types: positive and negative. The classification is based on how they respond to radiation during the manufacturing process.

Photoresist (also known as photoresist) refers to a kind of material that undergoes chemical reaction under visible light, ultraviolet light, electronic beam, X-ray, ion beam, etc., to...