Canon has achieved miniaturization at lower power consumption and lower cost with nanoimprint lithography (NIL), a new technology that is an alternative to conventional lithography …

2024年9月24日 · Canon has developed a lineup of Semiconductor Lithography Equipment designed to meet the technical requirements of a wide range of applications in addition to …

2023年10月13日 · Canon, the Japanese firm best known for its printers and cameras, launched a critical tool on Friday it says can help manufacture the most advanced semiconductors around. …

2025年1月2日 · Canon's new nanoimprint lithography technology promises to revolutionize chipmaking by producing 14-nm circuit features at a fraction of the cost of EUV systems. NIL …

In addition to fluoride dimer excimer lasers with wavelengths of 157 nm and X-ray lasers, EUV (Extreme Ultra-Violet) light sources are attracting keen attention. EUV sources have …

2024年10月1日 · Canon has shipped its first nanoprint lithography machine to the Texas Institute for Electronics (TIE). First announced by the company in October 2023, Canon has touted its …

2023年11月10日 · Due to the absence of an expensive light source and optical system, Canon’s nanoimprint lithography (NIL) cost could be one-tenth of ASML’s EUV machine. Compared to …

2023年10月17日 · The device uses nanoimprint lithography (NIL) technology as an alternative to photolithography, and can theoretically challenge extreme ultraviolet (EUV) and deep …

2024年1月31日 · Canon says its strategy with its nanoimprint lithography machines is not to replace DUV and EUV tools from fabs but rather to co-exist with existing tools.

2023年11月6日 · Canon recently introduced its nanoimprint lithography (NIL) tool that can be used to make chips on a 5nm-class process technology, and compete against ASML's …