Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...

Step aside, Darth Vader. National Aeronautics and Space Administration (NASA)'s Joint Extreme ultraviolet lithography (EUV) ...

1). Figure 1: Since the mid-1980s, the wavelength of light used in lithography systems has reduced by almost half from 365 nm to 193 nm. Extreme ultraviolet (EUV) lithography is the next step in ...

A California-based laboratory is set to lay the groundwork for the next evolution of extreme ultraviolet (EUV) lithography. Led by Lawrence Livermore National Laboratory (LLNL), the project aims ...

This advancement could pave the way for a new generation of 'beyond EUV' lithography systems that produce chips quicker and with less power. Of course, implementing BAT technologies into ...

As the title of this post suggests, this is no longer the case. Today’s deep submicron ICs require extreme ultraviolet (EUV) light lithography, and a great deal of innovation has gone into making this ...

We develop instrumentation and strategies for applications with the most challenging requirements in the High Tech Industry, including EUV lithography. The goal is to mitigate both particulate and ...

Extreme Ultraviolet (EUV) lithography is a critical technology for manufacturing semiconductor chips smaller than 7 nanometers. For years, Dutch company ASML has maintained a global monopoly on ...

New approaches in the development of extreme ultraviolet (EUV) lithography are being pioneered by Chinese scientists, paving the way for the mass production of advanced semiconductor chips as ...

A new technical paper titled “Sensitivity and contrast of indium nitrate hydrate resist evaluated by low-energy electron beam ...

Currently, Dutch company ASML Holding NV (AS:ASML) is the only major manufacturer of EUV lithography equipment, and under current U.S. sanctions, is prohibited from selling the technology to ...

Currently, Dutch company ASML Holding NV (AS:ASML) is the only major manufacturer of EUV lithography equipment, and under current U.S. sanctions, is prohibited from selling the technology to Chinese ...