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半导体键合设备行业研究:先进封装高密度互联推动键合技术发展
键合(Bonding)是通过物理或化学的方法将两片表面光滑且洁净的晶圆贴合在一起,以辅助半导体制造工艺或 者形成具有特定功能的异质复合晶圆。键合技术有很多种,通常根据晶圆的目标种类可划分为晶圆-晶圆键合 (Wafer-to-Wafer,W2W)和芯片 ...
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