The exposed areas of the photoresist become soluble (in positive photoresist) or insoluble (in negative photoresist) to the developer solution. The substrate is then developed, washing away the ...
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China developing critical chipmaking supply chains — photoresist ecosystem emerges for ArF and KrF lasersHigh-purity photoresists are essential for making chips on advanced production nodes. As China strides to build a self-sufficient semiconductor industry, it has to develop not only sophisticated ...
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