CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China Zhejiang Province Key Laboratory ...

ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals ...

The piezoelectric sensor is a device that converts mechanical stress or pressure into electrical signals in response to those stresses or pressures. Due to their high sensitivity, accuracy ...