Department of Civil and Environmental Engineering, Clarkson University, Potsdam, New York 13699, United States Institute for a Sustainable Environment, Clarkson University, Potsdam, New York 13699, ...

WA School of Mines: Minerals, Energy and Chemical Engineering, Curtin University, Perth, WA 6102, Australia Nanomaterials Centre, School of Chemical Engineering, Australian Institute for ...

ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals ...