CAS Key Laboratory of Magnetic Materials and Devices, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, P. R. China Zhejiang Province Key Laboratory ...

ANSYS(TM) FEM: #multiphysics #simulation of #MEMS-sensors based on #silicon with #piezoelectric thin-film layers and etched #quartz crystals ...

Piezo elements have the useful property of being bidirectional; that is they can move when you apply electricity to them, but they can also generate electricity when you move them. [Carl] takes ...

In this device, [Kerry] found that a long, narrow piezoelectric element spans the long axis of the sensor, suspended from what appears to be four flexible arms. [Kerry] probed the innards of the ...