MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip. These ...

Improvements in interferometry have made it a powerful and attractive technique for characterizing tiny devices based on microelectromechanical systems. The study of micro- and nanoscale surface ...

Definition: NEMS (Nanoelectromechanical Systems) are smaller-scale versions of MEMS (Microelectromechanical Systems), sharing similar functional integration of electrical and mechanical components but ...

Inspectrology provides Metrology and Wafer Inspection System sales and services to fabs in a wide range of market sectors including Microelectromechanical systems (MEMS), Semiconductor, Compound ...