Rapidus plans to install as many as 10 EUV lithography tools into its upcoming fabs in Japan, reports TrendForce, citing ...

Lam Research Corporation (Nasdaq: LRCX) today announced that Aether®, its innovative dry photoresist technology, has been ...

This is because all matter, including air, absorbs EUV radiation. For scanner manufacturers, this has two major consequences. First, it means that all the optical elements responsible for the ...

If you expose light perpendicular to a mirror, it’s going to come right back into the optical column of the EUV scanner, and it’s not going to hit the wafer. For example, when you look in the mirror, ...

“TSMC will bring in high-NA EUV scanners in 2024 to develop the associated infrastructure and patterning solution needed for customers to fuel innovation,” said Y.J. Mii, senior vice president ...