2023年9月，许多人为“光刻厂”的构想喜大普奔。据说中国可以另辟蹊径，不是用一台台的光刻机，而是用加速器做一个巨大的光源，可以供28 nm、14 nm、7 nm、5 ...

最后，对于中芯国际面临的技术瓶颈，王国辉承认，中国目前确实无法获得ASML的EUV光刻机，而这些设备是在尖端节点上生产芯片所需的。 然而 ...

最后，对于中芯国际面临的技术瓶颈，王国辉承认，中国目前确实无法获得ASML的EUV光刻机，而这些设备是在尖端节点上生产芯片所需的。 然而 ...

Hertz et al. 4 have developed a soft-X-ray/EUV microscope in the water window that achieves sub-visible-light resolution. The microscope consists of a laser-plasma source and zone-plate optics to ...

他还阴阳了一下英特尔，他说台积电在7纳米时引入了EUV，英特尔拒绝了EUV，现在的结果，大家都看到了。 他说，中国在EUV上落后世界先进水平10-15年 ...

哈尔滨工业大学（哈工大）近日宣布，已成功研发出13.5奈米极紫外光（EUV）光源技术，打破此领域由美国企业垄断的局面，也为大陆的国产EUV曝光机 ...

This uses a CO 2 laser of wavelength 10.6 μm to convert tin droplets into a plasma, which then emits bursts of broadband EUV radiation. According to Cymer, this set-up has twice the conversion ...

For years, Dutch company ASML has maintained a global monopoly on EUV machines using the laser-produced plasma (LPP) method. However, since 2019, US-led sanctions have barred ASML from selling ...

ASML’s strong moat is challenged by potential competitors and geopolitical risks. Read why ASML stock’s premium valuation may ...

Based on the SCMP's description, SMEE is attempting to patent the key set of components of an EUV tool: a laser-produced ...