manufacturers can achieve better resolution and alignment control. Another important application for UV lasers is wafer inspection in the semiconductor industry. The continuous reduction in the ...

The SB6/8e system features a rigid vacuum chamber for best-in-class post-bond alignment accuracy, independent upper and lower substrate heaters and precise programmable force control during the wafer ...

to fully automated wafer handling, such as automatic pre-alignment and fine alignment in the MicroProf ® AP. Overlay, which ...