In this device, [Kerry] found that a long, narrow piezoelectric element spans the long axis of the sensor, suspended from what appears to be four flexible arms. [Kerry] probed the innards of the ...

The NPS-XY-100A is a piezo scanned flexure guided nanopositioning stage with integrated capacitance position sensors. It is made of Super Invar and is capable of sub-nanometer resolution and ...

Prof. Ryu explains, "Our study explains the materials and device fabrication strategies for tactile sensors using piezoelectric and triboelectric effects, as well as the types of sensory recognition." ...