all integrated onto the same chip. A MEMS device typically contains a microelectromechanical sensor or actuator element packaged together with an integrated circuit (IC). The IC provides an electrical ...

[Breaking Taps] has an investigation of a MEMS chip. MEMS is short for Micro Electromechanical ... We usually mill a cavity on the top of an IC and use fuming nitric on a hot plate (under a ...

X-FAB to Provide Foundry Services for Akustica's Family of CMOS MEMS Silicon Microphone Chips ERFURT, GERMANY and PITTSBURGH, PA -- May 31, 2006 -- Akustica, Inc., a pioneer in acoustic system-on-chip ...