As the pattern is transferred, it is reduced in scale by a projection lens ... ultraviolet lithography can achieve these resolutions with a single exposure and with fewer design restrictions ...

Photolithography at a wavelength of 193 nm in the deep UV with water immersion lenses can now produce microelectronics containing features with a half-pitch as small as 40 nm. The big question is ...

The final single color lens is developed on a plate and resembles silicon chips before they're put into larger circuits. Credit: 2024 Konishi et al. CC-BY-ND The process of lithography ...