As the pattern is transferred, it is reduced in scale by a projection lens. The history of photolithography is a continuous effort to improve the resolution of lithography systems (commonly known ...

To achieve the required 10% uniformity of the printed linewidths even for low-κ 1 processes, the aberrations of the lithography lenses have to be reduced to an extremely low level of just a few ...

Researchers introduce a cost-effective method for producing optical Fresnel zone plate lenses, using colored photoresists for ...

Researchers from JSR Corp. and the University of Tokyo developed flat Fresnel zone plates, paving the way for innovative, ...

The final single color lens is developed on a plate and resembles silicon chips before they're put into larger circuits. Credit: 2024 Konishi et al. CC-BY-ND The process of lithography ...