This pattern can then guide further processes, such as etching or doping, to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate ...

Photolithography plays a crucial role in the ... developed an array system based on these DUV micro-LEDs. In this work, the ...

"Compared with other representative works, our innovation features smaller ... Micro-Light-Emitting Diode Displays for Maskless Photolithography", has been published in the journal Nature Photonics.