Laser holographic lithography 5 and direct-laser-writing (DLW) techniques 6 are two useful approaches. Laser holographic lithography uses the interference of several coherent laser beams to define ...

Working at i-line (λ=364nm), with standard novolak resists, we have demonstrated features as small as 50 nm. The processing has been developed and demonstrated with an interferometric lithography tool ...

Holographic photopolymers can be cast onto and around other optical elements ... tapered and shaped along its path to implement mode transformations between encapsulated subcomponents. We have also ...

Some of the techniques are pretty exotic. For example, holographic lithography can produce high-performance lithium-ion batteries. However, some of the processes didn’t sound much different than ...