Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...
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Russia plans EUV chipmaking tools that it says will be cheaper and easier to build than ASML's — country outlines new roadmap to smaller chipsEUV tools with a 11.2nm wavelength The Russian ... Although 11.2 nm still falls within the extreme ultraviolet spectrum, this shift is not a minor adjustment. It means that all optical elements ...
This enables the EUV lithography era of today, which is likely to continue for the foreseeable future. Initially, EUV became ...
9月，佳能交付了一种技术的首个商业版本，该技术有朝一日可能颠覆最先进硅芯片的制造方式。这种技术被称为纳米压印光刻技术（NIL，nanoimprint ...
最后，对于中芯国际面临的技术瓶颈，王国辉承认，中国目前确实无法获得ASML的EUV光刻机，而这些设备是在尖端节点上生产芯片所需的。 然而 ...
快科技1月6日消息，美国劳伦斯利弗莫尔国家实验室（LLNL）正在研究一种效率比传统CO2 EUV激光器高10倍的激光器，这将为下一代EUV光刻技术发展奠定 ...
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