Demand for AI chips is growing exponentially, but costs and complexity limit the technology to a handful of companies. That ...

The integration of a coherent EUV source employing a high-harmonic laser system and EUV scattero-metric microscopy has enabled the construction of a practical system for CD measurement and the ...

EUV source. An LPP EUV source comprises a CO2 light source that is applied to tiny tin droplets around 30 microns in diameter ...

First, because EUV light is absorbed by air (in contrast with 193 nm light), the entire optical system, from source to wafer, must be enclosed in a near-vacuum environment. Second, because EUV ...

EUV Tech (EUVT), a global leader in manufacturing at-wavelength EUV metrology equipment, is excited to announce the next ...