2023年9月，许多人为“光刻厂”的构想喜大普奔。据说中国可以另辟蹊径，不是用一台台的光刻机，而是用加速器做一个巨大的光源，可以供28 nm、14 nm、7 nm、5 ...

最后，对于中芯国际面临的技术瓶颈，王国辉承认，中国目前确实无法获得ASML的EUV光刻机，而这些设备是在尖端节点上生产芯片所需的。 然而 ...

最后，对于中芯国际面临的技术瓶颈，王国辉承认，中国目前确实无法获得ASML的EUV光刻机，而这些设备是在尖端节点上生产芯片所需的。 然而 ...

Hertz et al. 4 have developed a soft-X-ray/EUV microscope in the water window that achieves sub-visible-light resolution. The microscope consists of a laser-plasma source and zone-plate optics to ...

哈尔滨工业大学（哈工大）近日宣布，已成功研发出13.5奈米极紫外光（EUV）光源技术，打破此领域由美国企业垄断的局面，也为大陆的国产EUV曝光机 ...

而王国辉突然表态看好中芯国际，认为中国国内市场庞大且具备一定的“隔离效应”，中芯国际缺的是一台国产EUV光刻机，一旦有公司成功研发出EUV ...

ASML’s strong moat is challenged by potential competitors and geopolitical risks. Read why ASML stock’s premium valuation may ...

This uses a CO 2 laser of wavelength 10.6 μm to convert tin droplets into a plasma, which then emits bursts of broadband EUV radiation. According to Cymer, this set-up has twice the conversion ...

For years, Dutch company ASML has maintained a global monopoly on EUV machines using the laser-produced plasma (LPP) method. However, since 2019, US-led sanctions have barred ASML from selling ...

Based on the SCMP's description, SMEE is attempting to patent the key set of components of an EUV tool: a laser-produced ...