Interestingly, DUV lithography at a wavelength of 193 nm ... where etching is only performed once as a final stage. Overall, double-exposure techniques are considerably more costly than the ...

This enables the EUV lithography era of today, which is likely to continue for the foreseeable future. Initially, EUV became ...

For example, so-called double-patterning techniques ... Extreme ultraviolet lithography can achieve these resolutions with a single exposure and with fewer design restrictions, increasing wafer ...