《科创板日报》20日讯，在应用业务中，ASML在第四季度向客户交付了第一台YieldStar 385系统。YieldStar 385具备最新的量测技术，提高量测速度和准确度，可以满足3纳米制程的要求。 与以前的系统相比，主要的增强功能包括更快的工作台和更快的波长切换，这可以 ...

ASML Holding N.V. develops ... In addition, it offers metrology and inspection systems, including YieldStar optical metrology systems to assess the quality of patterns on the wafers; and HMI ...

ASML Holding N.V. develops ... In addition, it offers metrology and inspection systems, including YieldStar optical metrology systems to assess the quality of patterns on the wafers; and HMI ...