Interestingly, DUV lithography at a wavelength of 193 nm has dominated the field much longer than originally expected, with a continual series of improvements prolonging its lifespan. The ...

Since the 1980s, cutting-edge lithography has shifted from the 365 nm 'i-line' of mercury vapour lamps to deep-ultraviolet light from excimer lasers at 248 nm (krypton fluoride lasers) and 193 nm ...

One of the deep ultraviolet (DUV) lithography machines operates at a wavelength of 193 nanometres (nm), with a resolution ...