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国产 EUV 激光诱导放电等离子体(LDP)技术迎来突破
中国国内极紫外 (EUV) 光刻技术的发展并非遥不可及。目前,华为东莞工厂正在测试的最新系统利用激光诱导放电等离子体 (LDP) 技术,代表了一种具有颠覆性的 EUV 光生成方法。该系统计划于 2025 年第三季度进行试生产,并计划于 2026 ...
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